Digging gold: keV He+ ion interaction with Au

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Digging gold: keV He+ ion interaction with Au

Helium ion microscopy (HIM) was used to investigate the interaction of a focused He(+) ion beam with energies of several tens of kiloelectronvolts with metals. HIM is usually applied for the visualization of materials with extreme surface sensitivity and resolution. However, the use of high ion fluences can lead to significant sample modifications. We have characterized the changes caused by a ...

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ژورنال

عنوان ژورنال: Beilstein Journal of Nanotechnology

سال: 2013

ISSN: 2190-4286

DOI: 10.3762/bjnano.4.53